|
Stepper Reticle Specifications (Based on typical
orders not capabilities)
|
Substrate
size
|
Material
|
CD
Tol
(±µm)
|
CD
Range
(µm)
|
Defect
0 > (µm)
|
Registration
(±µm)
|
| UT1X |
| 5"
X 3" x 0.090" |
QZ |
0.08 |
0.08 |
0.5 |
0.1 |
| 5"
x 0.090" |
QZ |
0.08 |
0.08 |
0.5 |
0.1 |
| 6"
x 0.250" |
QZ |
0.05 |
0.05 |
0.35 |
0.1 |
| 5X
Reduction ( G-line, I-line ) |
| 5"
x 0.090" |
QZ |
0.1 |
0.1 |
1 |
0.15 |
| 6"
x 0.120" |
QZ |
0.08 |
0.08 |
0.5 |
0.08 |
| 6"
x 0.250" |
QZ |
0.08 |
0.08 |
0.25 |
0.08 |
| 2.5X
& 2X Reduction (I-line) |
| 6"
x 0.120" |
QZ |
0.08 |
0.08 |
0.5 |
0.08 |
| 6"
x 0.250" |
QZ |
0.07 |
0.07 |
0.5 |
0.07 |
| 4X
Reduction (DUV) |
| 6"
x 0.250" |
QZ |
0.04 |
0.04 |
0.2 |
0.05 |
|
|
