|
Copy
Mask Specifications (Based on typical orders not
capabilities))
|
Copy
Masks
|
Standard
Grade
|
High
Grade
|
|
|
|
|
Registration
|
|
|
Registration
|
|
Chrome
Copies
|
CD
Tol+/-
|
Defect
|
SLW/SL/WC
|
QZ
|
CD
Tol+/-
|
Defect
|
SLW/SL/WC
|
QZ
|
| 3"
x 0.060" |
0.5um |
3
per sq inch @ 3um |
1um |
0.5um |
0.3um |
2
per sq inch @ 2um |
1um |
0.5um |
| 4"
x 0.060" |
0.5um |
3
per sq inch @ 3um |
1um |
0.5um |
0.3um |
2
per sq inch @ 2um |
1um |
0.5um |
| 5"
x 0.090" |
0.5um |
3
per sq inch @ 3um |
1.5um |
0.5um |
0.3um |
2
per sq inch @ 2um |
1.5um |
0.5um |
| 6"
x 0.090" |
0.5um |
3
per sq inch @ 3um |
2um |
0.5um |
0.3um |
2
per sq inch @ 2um |
2um |
0.5um |
| 6"
x 0.120" |
0.5um |
3
per sq inch @ 3um |
2um |
0.5um |
0.3um |
2
per sq inch @ 2um |
2um |
0.5um |
| 7"
x 0.120" |
0.5um |
3
per sq inch @ 3um |
2um |
0.5um |
0.3um |
2
per sq inch @ 2um |
2um |
0.5um |
| Iron
Oxide |
CD
Tol+/- |
Defect |
Registration |
CD
Tol+/- |
Defect |
Registration |
| 6"
x 0.090" |
0.5um |
3
per sq inch @ 3um |
2um |
n/a |
0.3um |
2
per sq inch @ 2um |
2um |
n/a |
| 7"
x 0.120" |
0.5um |
3
per sq inch @ 3um |
2um |
n/a |
0.3um |
2
per sq inch @ 2um |
2um |
n/a |
|
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