|
1X Master Specifications (Based on typical orders
not capabilities)
| 1x
Masters |
SL/WC
Material
|
QZ
Material
|
| Substrate
Size |
CD
Tol (±µm) |
Defect |
Registration
(±µm) |
CD
Tol
(±µm) |
Defect |
Registration
(±µm) |
| 3"
x 0.060" |
0.35 |
1
per sq inch @ 2um |
0.5 |
0.15 |
1
per sq inch @ 1um |
0.25 |
| 4"
x 0.060" |
0.35 |
1
per sq inch @ 2um |
0.5 |
0.15 |
1
per sq inch @ 1um |
0.25 |
| 5"
x 0.090" |
0.35 |
1
per sq inch @ 2um |
0.5 |
0.15 |
1
per sq inch @ 1um |
0.25 |
| 6"
x 0.120" |
0.35 |
1
per sq inch @ 2um |
1 |
0.15 |
1
per sq inch @ 1um |
0.25 |
| 7"
x 0.120" |
0.35 |
1
per sq inch @ 2um |
1 |
0.15 |
1
per sq inch @ 1um |
0.25 |
| 7.25R
x 0.250" |
0.35 |
1
per sq inch @ 2um |
1 |
0.15 |
1
per sq inch @ 1um |
0.25 |
|
|
